To provide a probe card in which pads, conductor circuits or the like formed on a ceramic substrate are protected, in which the pads or the conductor circuits ceill not be stripped from the ceramic substrate, even when the probe card is used repeatedly over a long period and by which a circuit formed on a semiconductor wafer can be inspected properly.

In the probe card, the pads are formed on one main face of the ceramic substrate. In the probe card, an insulating layer is formed at least in the circumference of the pads and in their periphery.