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Patent Searching and Data


Title:
PROBE CARD
Document Type and Number:
Japanese Patent JPH05129387
Kind Code:
A
Abstract:

PURPOSE: To obtain a probe card capable of transmitting an electric signal with accuracy by interposing an insulators between contacts.

CONSTITUTION: Insulators 22b and 22c are interposed between rows of contacts 2a to 22c, 22d to 22f and 22g to 22i. The contacts 22a to 22i are fixed with the surfaces of the insulators 21a to 21c, which makes it possible to hold the insulation properties between the contacts 22a to 22i definitely. The contacts 22a to 22i form a plurality of contact rows 22a to 22c, 22d to 22f and 22g to 22i in the shape of layers. Furthermore, sheet-shaped insulators 21a to 21c are interposed between each of the contacts 22a to 22c, 22d to 22f and 22g to 22i. Therefore, an increase in the number of layers makes it possible to hold more definite insulation properties between the contacts 22a to 22i and place them into contact with area bumps within a chip easily. It is, therefore, possible to hold the insulation properties between the contacts more definitely.


Inventors:
KODAMA HIROTSUGU
Application Number:
JP29168891A
Publication Date:
May 25, 1993
Filing Date:
November 07, 1991
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01R1/073; G01R31/26; H01L21/66; G01R1/067; (IPC1-7): G01R1/067; G01R1/073; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Keizo Okamoto