Title:
高周波応用分野用のプローブカード
Document Type and Number:
Japanese Patent JP7307104
Kind Code:
B2
Abstract:
A probe card for testing a device under test having a plurality of contact pads includes a support plate having first contact pads thereon. A flexible membrane has a first face and a peripheral portion including second contact pads thereon. A plurality of contact probes are associated with a first face of the flexible membrane and are configured to abut onto the plurality of contact pads of the device under test. A sliding contact area includes: the first contact pads formed on the support plate; the second contact pads formed on the peripheral portion of the flexible membrane, the peripheral portion of the flexible membrane configured to come in pressing contact onto the support plate at the sliding contact area. A pressing element contacts the peripheral portion of the flexible membrane at the sliding contact area, and the pressing element puts the second contact pads into pressing contact with the first contact pads.
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Inventors:
Vettori, Ricardo
Application Number:
JP2020572764A
Publication Date:
July 11, 2023
Filing Date:
July 02, 2019
Export Citation:
Assignee:
Techno Probe Societa Per Athioni
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JP2009042008A | ||||
| JP2008082912A | ||||
| JP2013246153A | ||||
| JP5047864A |
Foreign References:
| US20080061808 | ||||
| US20040036493 |
Attorney, Agent or Firm:
Patent Attorney Corporation Asahina Patent Office
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