To provide a probe device capable of surely delivering a probe card when transferring and attaching the probe card in order to suppress an occurrence of damage or the like of the probe card, and to provide a probe card attachment method of the probe device.

The probe device includes a card clamp mechanism 13, a wafer chuck 10, a tray 21 with an alignment mark provided on the undersurface, a tray support mechanism 14 capable of supporting the tray 21, a camera 15, a movement mechanism 17 for transferring the tray 21 to a delivery position to the tray support mechanism 14, and control means for detecting a position of the alignment mark of the tray 21 arranged at the delivery position by the movement mechanism 17 by imaging the alignment mark with the camera 15, delivering a probe card 20 from the movement mechanism 17 to the tray support mechanism 14 in the case that the position of the alignment mark is within a prescribed range, and stopping delivering the probe card 20 in the case of being outside the prescribed range.