Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PROBE DEVICE
Document Type and Number:
Japanese Patent JPH0843493
Kind Code:
A
Abstract:

PURPOSE: To obtain a probe device by which a test head can be inclined smoothly and in which the test head can be stopped in an arbitrary position while it is being circled by installing a nut member or the like which is raised and lowered so as to be interlocked with the rotation of a main shaft.

CONSTITUTION: When the air is supplied to a cylinder 17 from an air-supply source, a circling arm 16 is circled around a main shaft 11, a rotating force is given to the main shaft 11, and a test head which has been fixed to a support arm 15 is circled around the main shaft 11. A nut member 23 is raised and lowered so as to be interlocked with the rotation of the main shaft 11, a screw member 26 which has been screwed to the nut member 23 is turned as the nut member 23 is raised and lowered, and a lock plate which is provided with a plurality of coupling parts is turned integrally in the circumferential direction. When the test head reaches a desired position, the supply of the air to the cylinder 17 is stopped, and the rotation of the main shaft 11 is stopped. Then, when a lock pin is coupled to the coupling parts at the lock plate, the screw member 26 is locked. As a result, the main shaft 11 is locked so as to be incapable of being turned, and the test head is stopped and held while it is being circled.


Inventors:
NAKAJIMA HISASHI
Application Number:
JP17846394A
Publication Date:
February 16, 1996
Filing Date:
July 29, 1994
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO ELECTRON LTD
TEL YAMANISHI KK
International Classes:
H01L21/66; G01R31/28; (IPC1-7): G01R31/28; H01L21/66
Attorney, Agent or Firm:
Takehiko Suzue



 
Next Patent: ELECTRONIC CIRCUIT