PURPOSE: To remove a substance to be an obstacle for measuring such as a metal oxide, a passivation membrane, an interlayer membrane, and the like, on an electric device or an electric circuit, without generating a damage to the circuit, by carrying out the electric measurement of an object to measure while cutting by using a probe head which has an edge to cut.

CONSTITUTION: A metallic probe 1 can be rotated and moved vertically by a driving system. A conductive bearing 3 is fixed to a holding member 4. The holding member 4 is to be an electrode to pick up an electric signal 3 transmitted through the probe 1, concurrently. The diameter of an edge 2 is made less than 50μm favorably, and about 10μm more favorably. The edge 2 forms a hole on an oxide covering membrane 5 and a metallic part 6 of a pad 8 for measuring in order, so as to form an electric circuit between the pad 8 and the holding member (electrode) 4. The diameter of a hole 7 cut by the edge is made less than 50μm, and the depth is made in several μm. The regulation of the height is made by combining a minute amount displacement means 9 to a regulating mechanism 10. The characteristics measurement of a device or an electric circuit can be made possible through the pad 8.