To provide a probe for light detection or radiation in which a minute opening can be formed with excellent repeatability, even in the case of a minute opening having an opening size of 100 nm or less, and to provide its manufacturing method.
This probe for light detection or radiation is composed by exposing a transmissive film 2 from a minute opening 3 formed on a shielding member 1, and has such a characteristic that a projection 5, having a convex shape against a main face of the shielding member 1, is formed by the film 2 exposed from the minute opening 3. This manufacturing method of the probe is a manufacturing method of a probe for light detection or radiation by exposing the film 2 from a minute opening 3 formed on the shielding member 1, and has at least a process in which the shielding member 1 and the film 2 are formed by junction, and a process in which the minute opening 3, from which a part of the film 2 is exposed, is formed by abrading and removing a part of the shielding member 1.
YAGI TAKAYUKI
SHIMADA YASUHIRO
