Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PROBE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2009092532
Kind Code:
A
Abstract:

To provide a probe manufacturing method which provides short manufacturing time and can reduce manufacturing costs.

The probe manufacturing method is for a probe comprising a support part to be mounted to a substrate of a probe card, a beam part which has elasticity and is supported by the support part, and a tip part which is the tip of the beam part and has a contact tip to be in contact with an electrode of an object to be inspected. The method includes: a step of forming a conductive layer on a metallic plate and leaving the conductive layer in a plurality of islands manner by etching at places in which the probes are formed; a step of forming slits between the conductive layer left in a plurality of islands manner with part of the metallic plate left as connecting parts for connecting the plurality of probes and removing the metallic plate between the adjacent probes; and a step of forming the metallic plate into a side shape corresponding to the support part, the beam part and the tip part of the probe by press working. A plurality of probes are manufactured so that they are connected by the connecting parts.


Inventors:
OKUBO MASAO
Application Number:
JP2007264074A
Publication Date:
April 30, 2009
Filing Date:
October 10, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
JAPAN ELECTRONIC MATERIALS
International Classes:
G01R1/067; G01R1/073; H01L21/66
Attorney, Agent or Firm:
▲吉▼川 俊雄