Title:
PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3402495
Kind Code:
B2
Abstract:
PURPOSE: To easily reduce the error between a result after image processing and an actual shape due to non-linearity between the applied voltage of a piezoelectric element and displacement, regarding a probe microscope for measuring the shape of sample surface and the physical quantity thereof, while having a scanner formed out of a piezoelectric element as a means for causing the relative travel of a sample and a detecting section.
CONSTITUTION: One or more scanners 23 are provided in addition to a scanner 6 formed out of a piezoelectric element for moving a sample 3 or a detecting section 5, and a displacement detecting sensor 24 is formed around the scanners 23. In this case, the scanners 23 are operated in a way similar to the scanner 6, and the operation of the scanners 23 is measured to indirectly measure the operation of the scanner 6, thereby reducing an error between a result after image processing and an actual shape due to non-linearity between the applied voltage of the piezoelectric element used in the scanner 6 and the displacement.
Inventors:
Shigeru Wakiyama
Application Number:
JP26916993A
Publication Date:
May 06, 2003
Filing Date:
October 27, 1993
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01N37/00; G01Q10/00; G01Q10/04; G01Q30/06; G01Q60/10; G01Q60/24; G01Q90/00; (IPC1-7): G01N13/10; G12B21/20
Domestic Patent References:
JP225702A | ||||
JP36405A | ||||
JP1131402A | ||||
JP5154743A | ||||
JP4330653A | ||||
JP3208246A | ||||
JP579811A | ||||
JP3211401A | ||||
JP5190933A | ||||
JP5118807A | ||||
JP2216749A |
Attorney, Agent or Firm:
Masaaki Sakaue
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