Title:
プローブ及び走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP4282588
Kind Code:
B2
Inventors:
Osamu Matsuzawa
Kiharu Shirakawa
Akira Inoue
Naoya Watanabe
Futako Aziko
Masatsugu Shigeno
Kiharu Shirakawa
Akira Inoue
Naoya Watanabe
Futako Aziko
Masatsugu Shigeno
Application Number:
JP2004339847A
Publication Date:
June 24, 2009
Filing Date:
November 25, 2004
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01B21/30; G01Q30/14; G01Q60/30; G01Q60/32; G01Q60/38; G01Q70/10
Domestic Patent References:
| JP9126833A | ||||
| JP11051947A | ||||
| JP2002310883A | ||||
| JP5052506A | ||||
| JP2002014030A | ||||
| JP2006125846A | ||||
| JP10170527A |
Other References:
紫野真次 他,液中共振モ-ド用マイクロカンチレバ-の開発(1),2004年(平成16年)秋季第65回応用物理学会学術講演会講演予稿集,日本,(社)応用物理学会,2004年 9月 1日,第2分冊,p. 592, 4p-H-7
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Tadashi Takahashi
Masakazu Aoyama