Title:
PROBE UNIT, PROBE CARD, AND METHOD FOR MANUFACTURING THE PROBE UNIT
Document Type and Number:
Japanese Patent JP2010281623
Kind Code:
A
Abstract:
To provide a probe card which can suppress peeling-off of an arm from a base, and a method for manufacturing the probe card.
The probe card includes: a substrate 100; and a plurality of first and second probes 200a, 200b arranged on the substrate 100 in a row. The first and second probes 200a, 200b include bases 210a, 210b, arms 220a, 220b, and contact portions 230a, 230b. The width dimension of the bases 210b is larger than that of the bases 210a. R1 is the distance between mutually adjoining bases 210a and 210b, R2 is the distance between mutually adjoining bases 210a and 210a, and R3 is the distance between mutually adjoining bases 210b and 210b, wherein R1, R2, and R3 are the same.
Inventors:
Fukushima, Noriyuki
Tajima, Shohei
Hara, Kentaro
Tajima, Shohei
Hara, Kentaro
Application Number:
JP2009000133824
Publication Date:
December 16, 2010
Filing Date:
June 03, 2009
Export Citation:
Assignee:
JAPAN ELECTRONIC MATERIALS CORP
International Classes:
G01R1/073; G01R31/26; H01L21/66
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