PROBE UNIT AND ITS MANUFACTURING METHOD

Title:

PROBE UNIT AND ITS MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP2002286758

Kind Code:

A

Abstract:

To provide a probe capable of efficiently inspecting continuity characteristics of a highly integrated electronic component, preventing the damage of wiring or a terminal in inspection, preventing the coming-off of a projection of the probe in manufacturing or inspection, suitably inspecting parallel wiring, and coping with slight displacement of the probe, and to provide the manufacturing method of the probe.

In this prove unit having a plurality of metallic leads regularly arranged in parallel on the surface of a substrate, one end of the metallic lead 2 is separated from the surface or projected from the end of the substrate to form an elastic contact piece 3, the thickness of the elastic contact piece 3 is made almost uniform over the whole, the cross section shape of the elastic contact piece is curved in an arc shape and/or a projection is formed in the vicinity of the tip of the elastic contact piece.

Inventors:

HATTORI ATSUO
SAWADA SHUICHI
SUGIURA MASAHIRO
TERADA YOSHIKI

Application Number:

JP2001092645A

Publication Date:

October 03, 2002

Filing Date:

March 28, 2001

Export Citation:

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Assignee:

YAMAHA CORP

International Classes:

G01R1/073; G01R1/067; H01L21/66; G01R3/00; H05K3/40; (IPC1-7): G01R1/073; H01L21/66

Domestic Patent References:

JP2000512437A

2000-09-19

Attorney, Agent or Firm:

Masatake Shiga (1 person outside)

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