Title:
PROBE UNIT
Document Type and Number:
Japanese Patent JP2018031597
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a probe unit that can measure a resistance value with high accuracy.SOLUTION: A probe unit (1) according to the present invention comprises: a supporting body (3) that mutually opposes a pair of probes (2) to support the pair thereof in a cantilevered manner; drive means (4) that is capable of changing a relative distance between the supporting body and a measured body; and a stopper (5) that is located between the pair of probes. The drive means is configured to move any one of the supporting body and the measured body in a direction where the relative distance of both supporting body and the measured body is narrowed, and after bring a tip end of the pair of probes into contact with a surface of an electrode (11), deform the pair of probes in a direction where the pair thereof gets proximity to each other accompanied by a further movement in the same direction, and thereby make the pair of probes abut on the stopper to regulate an inter-opposing distance of the pair of probes.SELECTED DRAWING: Figure 3
Inventors:
KASHIWAGI KOTARO
OHARA HIRONARI
OHARA HIRONARI
Application Number:
JP2016162036A
Publication Date:
March 01, 2018
Filing Date:
August 22, 2016
Export Citation:
Assignee:
KOA CORP
International Classes:
G01R1/073; H01C17/00
Domestic Patent References:
| JP2003227848A | 2003-08-15 | |||
| JPS56119602U | 1981-09-11 | |||
| JP2000111574A | 2000-04-21 | |||
| JP2005119941A | 2005-05-12 | |||
| JP2004226086A | 2004-08-12 | |||
| JP2015010980A | 2015-01-19 |
Foreign References:
| WO2006095759A1 | 2006-09-14 |
Attorney, Agent or Firm:
Patent Business Corporation Takewa International Patent Office
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