PURPOSE: To realize measurement, not susceptible to external noise, even of an integrated circuit having short pitch between pads.

CONSTITUTION: The probe unit comprises a probe 10 contacting with the pad part on a device to be measured and communicating an electric signal therewith, and a transmission body 11 comprising metal conductors applied on the inner and outer peripheries of a tubular insulator material with the probe 10 being inserted therein. Electric signals to be communicated between the probe 10 and the device are transmitted on the transmission body 11.