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Patent Searching and Data


Title:
PROBE WITH MINUTE PROTRUSION AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2000035396
Kind Code:
A
Abstract:

To improve an S/N ratio and to develop an enhanced light and temperature detection resolution by forming a probe where a plurality of minute protrusions with a gap inside are jointed over a plurality of electrically independent junction layers being formed on a substrate or an elastic body.

A probe with a minute protrusion 5 having its junction interface with two different material layers detects secondary phenomenon where a certain physical phenomenon occurs due to an action at a junction interface and detects the physical phenomenon of light and temperature being detected by the electromotive force of light and heat on the junction interface. The probe is a light-detecting probe where the minute protrusion 5 with two semiconductor layers with different conduction types is mounted on a substrate or an elastic body, and the minute pyramidal protrusion 5 is joined onto the junction layer being formed on the substrate or the like. The protrusion 5 is provided with a gap at an area to the inner substrate. The protrusion 5 is provided with first and second semiconductor layers 51 and 52 with different conductive types, and the layer 51 is joined to a first junction layer 63, and the layer 52 is joined to the second junction layer 64.


Inventors:
SHIMADA YASUHIRO
YAGI TAKAYUKI
KURODA AKIRA
Application Number:
JP21850598A
Publication Date:
February 02, 2000
Filing Date:
July 16, 1998
Export Citation:
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Assignee:
CANON KK
International Classes:
G01B7/34; G01B21/30; G01N37/00; G01Q30/02; G01Q60/22; (IPC1-7): G01N13/14; G01B7/34; G01B21/30
Attorney, Agent or Firm:
Tatsuya Nagao