Title:
PROBING DEVICE
Document Type and Number:
Japanese Patent JP2681619
Kind Code:
B2
Abstract:
PURPOSE: To provide a probing device provided with a probe card holding jig, which is capable of compensating for a stress concentration or a heat displacement.
CONSTITUTION: This probing device is provided with a probe card 10, which is provided with a probing needle 12 to come into contact with an object to be inspected to measure the electrical characteristics of the object to be inspected and a guide means 13 for guiding the needle 12, and a probe card holding jig 30 for holding and fixing the card 10 at a prescribed measurement position. Moreover, the device is constituted by a method wherein hole parts or groove parts 39 are provided in the jig 30 along the peripheral direction of the jig 30 so as to relax a stress concentration, which is applied to the jig 30 at the time of the measurement, or the material for the jig 30 is combined with a material of a thermal expansion coefficient different from that of the material for the jig 30 so as to compensate for a heat displacement, which is applied to the jig 30 at the time of the measurement.
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Inventors:
Masao Yamaguchi
Application Number:
JP5498595A
Publication Date:
November 26, 1997
Filing Date:
February 20, 1995
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R31/26; G01R1/073; H01L21/66; (IPC1-7): H01L21/66; G01R1/073; G01R31/26
Domestic Patent References:
| JP3224246A | ||||
| JP3290918A | ||||
| JP2304368A | ||||
| JP1235344A | ||||
| JP271540A | ||||
| JP536767A |
Attorney, Agent or Firm:
Kamei Miaki (1 person outside)