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Title:
PROCESS FOR CHARGING LIQUEFIED AMMONIA, AND PROCESS FOR PRODUCTION OF NITRIDE CRYSTAL
Document Type and Number:
Japanese Patent JP2009102174
Kind Code:
A
Abstract:

To provide a process for charging liquefied ammonia where a container is cooled without using cooling equipment, and the container can be charged with ammonia having high purity at high precision.

The process for charging liquefied ammonia comprises: the feeding step of feeding gaseous ammonia to a condenser, the liquefaction step of liquefying the gaseous ammonia in the condenser, the charging step of feeding the ammonia liquefied in the condenser to a container to charge the container with liquefied ammonia, the measurement step of obtaining the total quantity M1 of the ammonia present in the ammonia charging apparatus and the quantity M2 of the ammonia present in the ammonia charging apparatus other than the container in a state where the charging and discharging to the container are stopped, and the charging quantity regulation step of exhausting, from the container, the liquefied ammonia by a quantity equivalent to (M1-M2-MC), i.e., a difference between a difference between the M1 and M2 obtained in the measurement stage and the liquefied ammonia schedule charging quantity (MC) to the container.


Inventors:
KATO YUICHI
WATANABE TAKAO
HIRUTA KAZUNORI
Application Number:
JP2007266122A
Publication Date:
May 14, 2009
Filing Date:
October 12, 2007
Export Citation:
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Assignee:
MITSUBISHI CHEM CORP
International Classes:
C30B29/38; B01D9/02; B01J3/00; B01J3/02; B01J3/04; C30B7/10
Domestic Patent References:
JP2005008444A2005-01-13
JPH07243712A1995-09-19
JP2003044146A2003-02-14
JP2001271998A2001-10-05
JP2009102175A2009-05-14
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes