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Title:
PROCESS AND COMPOSITION WHICH STABILIZE CYCLOTETRASILOXANE FOR POLYMERIZATION
Document Type and Number:
Japanese Patent JP2010065039
Kind Code:
A
Abstract:

To provide a process and a composition for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization.

The process for stabilization comprises providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane. The composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material production, comprises: such cyclotetrasiloxane; and a free radical scavenger polymerization inhibitor.


Inventors:
Mayorga, Steven Gerard
Xiao, Manchao
Gaffney, Thomas Richard
Syvret, Robert George
Application Number:
JP2009000235563
Publication Date:
March 25, 2010
Filing Date:
October 09, 2009
Export Citation:
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Assignee:
AIR PRODUCTS CHEMICALS INC
International Classes:
C07F7/21; C01B33/113; C07F7/20; C08G77/04; C08G77/38; C09D4/00; C23C16/40; C23C16/42; H01L21/316; C08K5/13
Domestic Patent References:
JPH07145179A1995-06-06
JPH04128293A1992-04-28
Attorney, Agent or Firm:
青木 篤
石田 敬
古賀 哲次
永坂 友康
小林 良博
蛯谷 厚志