To provide a process control device and method that is robust against disturbance and reduces maintenance frequency more than heretofore.
A determination part read out device data generated from a sensor included in a process apparatus and determines whether the process apparatus an ordinary state. When the determination part determines that the process apparatus is the ordinary state, a correction value calculation part calculates a recipe correction value by using measurement data generated from a measurement instrument arranged behind the process apparatus and the apparatus data. Then, a recipe correction part corrects a recipe to be supplied to the process apparatus based on the correction value output from the correction value calculation part and transmits the corrected recipe to the process apparatus.
SON BINKEI
JP2005123641A | 2005-05-12 | |||
JP2008072047A | 2008-03-27 |
Hitoshi Ito