PROCESS FOR CONVERTING HIGH-BOILING RESIDUE INTO MONOSILANE BY DIRECT METHOD

Title:

PROCESS FOR CONVERTING HIGH-BOILING RESIDUE INTO MONOSILANE BY DIRECT METHOD

Document Type and Number:

Japanese Patent JP2002029729

Kind Code:

A

Abstract:

To provide a monosilane production process for converting a high- boiling residue derived from a reaction of hydrogen chloride with metalloid silicon, into monosilane by a method known as a direct method.

This process involves a conversion stage for bringing such a high-boiling residue into contact with gaseous hydrogen in the presence of an amount of an aluminum trichloride catalyst, effective in promoting conversion of the high-boiling residue into monosilane, wherein at least one portion of the required amount of the aluminum trichloride catalyst is produced in the above conversion stage using a direct method and an isolation stage of the converted monosilane, at the respective sites of these stages.

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Inventors:

BRINSON JONATHAN A
CRUM BRUCE ROBERT
JARVIS JR ROBERT FRANK

Application Number:

JP2000216747A

Publication Date:

January 29, 2002

Filing Date:

July 18, 2000

Export Citation:

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Assignee:

DOW CORNING

International Classes:

B01J27/125; C01B33/107; (IPC1-7): C01B33/107; B01J27/125

Attorney, Agent or Firm:

Warren G. Simor

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