Title:
PROCESS FOR FABRICATING ACTUATOR AND PROCESS FOR MANUFACTURING LIQUID EJECTION HEAD
Document Type and Number:
Japanese Patent JP2007116004
Kind Code:
A
Abstract:
To provide a process for fabricating an actuator equipped with a piezoelectric element in which the planarity of an oxide film on which a lower electrode is laminated is enhanced.
The process for fabricating an actuator comprises a step for forming an SOG (Spin-On Glass) film on a zirconium oxide film, a step for etching back the zirconium oxide film on which the SOG film is formed until the zirconium oxide film is planarized, a step for forming a lower electrode on the planarized zirconium oxide film, and a step for forming a piezoelectric film on the lower electrode.
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Inventors:
TSUDA AKIHITO
Application Number:
JP2005307707A
Publication Date:
May 10, 2007
Filing Date:
October 21, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/187; H01L41/22; H01L41/319; H02N2/00
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga