Title:
PROCESS GAS TRANSFER UNIT
Document Type and Number:
Japanese Patent JP3737869
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a small size and laminated process gas transfer unit in which a system communicating a purge valve and a check valve in series is connected to the process gas flow.
SOLUTION: A process gas input passage 20 to communicate the input port of a feeding valve 13 and a precess gas outer inlet 18; a process gas output passage to communicate the output port 27 of the feeding valve 13 and a process gas outer outlet 19; a purge output passage 22 to communicate the output port 29 of a purge valve 12 and the process gas output passage; a check valve output passage 23 to communicate the input port 30 of the purge valve 12 and the output port 31 of the check valve 14; an oblique passage to communicate the input port 32 of the check valve 14 and a purge gas outer inlet; a manifold forming a crossing passage; and a lower side passage block; are provided.
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Inventors:
Masato Ito
Inagaki Toshiyasu
Inagaki Toshiyasu
Application Number:
JP12252597A
Publication Date:
January 25, 2006
Filing Date:
May 13, 1997
Export Citation:
Assignee:
CKD Corporation
International Classes:
F16K7/17; F16K27/00; F16K15/02; F16K51/00; F17D1/02; (IPC1-7): F16K27/00; F16K7/17; F16K15/02; F16K51/00
Domestic Patent References:
| JP5172265A | ||||
| JP5203100A | ||||
| JP6241400A | ||||
| JP7074113A | ||||
| JP7122500A | ||||
| JP8005000A | ||||
| JP8312900A | ||||
| JP8326943A | ||||
| JP9184599A |
Attorney, Agent or Firm:
Takashi Tomizawa
Ikuo Yamanaka
Akika Okado
Ikuo Yamanaka
Akika Okado