Title:
PROCESS OF MANUFACTURING PIEZOELECTRIC ACTUATOR, DROPLET DISCHARGE HEAD, AND IMAGE FORMATION APPARATUS
Document Type and Number:
Japanese Patent JP2014179573
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a process of manufacturing a piezoelectric actuator, capable of suppressing occurrences of film peeling when manufacturing a piezoelectric actuator whose lower electrode or an upper electrode includes a SrRuOlayer.SOLUTION: The process of manufacturing a piezoelectric actuator having a structure in which a piezoelectric layer 12 is disposed between a lower electrode 11 and an upper electrode 13 and the lower electrode 11 and/or the upper electrode 13 contains a SrRuOlayer, includes an annealing treatment step in which annealing treatment is performed after a step of forming the SrRuOlayer.
Inventors:
NISHIMURA MANABU
ONISHI KOJI
UENO YOSHIKAZU
KURODA TAKAHIKO
ISHIMORI MASAHIRO
ONISHI KOJI
UENO YOSHIKAZU
KURODA TAKAHIKO
ISHIMORI MASAHIRO
Application Number:
JP2013054328A
Publication Date:
September 25, 2014
Filing Date:
March 15, 2013
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
H01L41/43; B41J2/16; H01L41/047; H01L41/09
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito