Title:
PROCESSING STEP MONITORING DEVICE
Document Type and Number:
Japanese Patent JP2023176595
Kind Code:
A
Abstract:
To provide a processing step monitoring device in which the number of devices of a system configuration is not proportional to the number of sensors even if the number of sensors is increased, and which can acquire a signal output from each sensor in the same system configuration.SOLUTION: A processing step monitoring device for monitoring a processing step by a manufacturing device comprises: a plurality of sensors which are attached to the manufacturing device; a plurality of selectors which have one input unit and a plurality of output units and are the same number as the number of sensors; a plurality of signal lines which are the same number as the number of output units of the respective selectors; and a controller. The respective sensors are connected to the input units of the plurality of corresponding selectors. The controller performs selection control so as to connect the input unit of each of the plurality of selectors to one end of the corresponding output unit and to open the other end, and connects the plurality of output units of the respective selectors to any of the plurality of corresponding signal lines.SELECTED DRAWING: Figure 2
Inventors:
NOJIRI HISANORI
Application Number:
JP2022088956A
Publication Date:
December 13, 2023
Filing Date:
May 31, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
G01L5/22; B30B15/00; B30B15/28; G01L5/00
Attorney, Agent or Firm:
Hiroshi Okabe
Hidetaka Okabe
Hidetaka Okabe