PROCESS FOR PRODUCING GLASS SUBSTRATE

Title:

PROCESS FOR PRODUCING GLASS SUBSTRATE

Document Type and Number:

Japanese Patent JP2011129232

Kind Code:

A

Abstract:

To provide a method for producing a glass substrate efficiently producing the glass substrate by satisfactorily pulling out performance of a fixed abrasive.

The method for producing the glass substrate includes a lapping step for grinding the main surface of the glass substrate and a main surface polishing step for polishing the main surface of the glass substrate after the lapping step. In the method, the lapping step includes a primary lapping step for grinding the main surface of the glass substrate, by using a free abrasive or a fixed abrasive; a secondary lapping step for grinding the main surface of the glass substrate using a fixed abrasive having a particle diameter smaller than that of the free abrasive or the fixed abrasive in the primary lapping step; and a cleaning step for cleaning the main surface of the glass substrate, by at least one of supersonic wave cleaning, scrub cleaning and acid cleaning, after the primary lapping step prior to the secondary lapping step.

Inventors:

ONO TAKEAKI
ITO MASABUMI

Application Number:

JP2009289677A

Publication Date:

June 30, 2011

Filing Date:

December 21, 2009

Export Citation:

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