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Title:
PROCESS FOR PRODUCING INTERMEDIATE STRUCTURE, AND INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP2009115524
Kind Code:
A
Abstract:

To produce an intermediate substrate by forming a conducting path simply and properly on a thick glass substrate, in an inspection device.

First, a plurality of conductive pins 31 are provided upright on a board 170 for standing pins. The glass substrate A is housed in a vessel 90 in a producing apparatus. The board 170, on which the pins have been stood is placed opposite to the glass substrate A in the vessel 90 so that the conductive pins 31 on the board 170 for erecting the pins face the glass substrate A side. The glass substrate A in the vessel 90 is heated and melted. The board on which the pins have been erected is moved toward the glass substrate A side, to allow the conductive pins on the board 170 for erecting the pins to be inserted into the molten glass substrate A. In such a state where the conductive pins 31 are inserted into the glass substrate A, the glass substrate A is cooled and solidified. The board 170 for making the pins stand erect is removed from the conductive pins 31. The obverse and reverse surfaces of the glass substrate A are polished.


Inventors:
KOMATSU SHIGEKAZU
Application Number:
JP2007286929A
Publication Date:
May 28, 2009
Filing Date:
November 05, 2007
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
JP2006194620A2006-07-27
JP2007067387A2007-03-15
JP2005317944A2005-11-10
JP2002151184A2002-05-24
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara