To provide a processing apparatus that calibrates a detection unit in a built-in state.
A processing apparatus 1 includes: a supply unit 10 which can store a reference fluid L2 whose property values are found in advance; a storage unit 20 which stores a working fluid L1; a processing unit 30 which is provided to the storage unit and performs processing using the working fluid; a detection unit 35 which converts property change of the fluid into an electric signal and outputs the electric signal; a calculation unit 55 which calculates property values of the fluid from the electric signal that the detection unit detects; a switching mechanism 60 which alternates and outputs one of the working fluid in the storage unit and the reference fluid in the supply unit to the detection unit; and an adjustment unit 65 which adjusts the property values that the calculation unit calculates so that the property values of the reference fluid that the calculation unit calculates from the electric signal output from the detection unit when the reference fluid is supplied to the detection unit reach the property values of the reference fluid found in advance.
YATSUDA HIROMI
MORI TOSHIMASA
KOGAI TAKASHI
| JP2007220429A | 2007-08-30 | |||
| JPH08159946A | 1996-06-21 |
Tadashi Takahashi
Toshio Komuro