Title:
PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2023002270
Kind Code:
A
Abstract:
To provide processing apparatus which is able to reduce an operator's burden caused by preparation and connection of pipes in washing a cooling water passage.SOLUTION: Processing apparatus includes: a chuck table for holding a workpiece; a spindle 22 to which a cutting blade 21, which is a grinding tool for processing the workpiece held on the chuck table, is attached; a spindle housing 25 rotatably supporting the spindle 22 and having a cooling water passage 72 in an inner part thereof; and a cooling water passage washing unit 40 which washes the cooling water passage 72. The cooling water passage washing unit 40 includes: a fluid supply unit 41 which is connected to the cooling water passage 72 via a valve 42 and supplies the cooling water passage 72 with washing water and compressed air; and a control unit 43 which controls the valve 42.SELECTED DRAWING: Figure 3
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Inventors:
WATANABE KOJI
Application Number:
JP2021103407A
Publication Date:
January 10, 2023
Filing Date:
June 22, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B23Q11/12; B24B41/04; B24B41/06; B24B55/02; H01L21/301; H01L21/304
Attorney, Agent or Firm:
Sakai International Patent Office