Title:
PROCESSING DEVICE INCLUDING CLEANING MECHANISM
Document Type and Number:
Japanese Patent JP2013229462
Kind Code:
A
Abstract:
To provide a structure which allows static electricity to be promptly discharged through a grounding wire by using a conductive and flexible sheet cover member, causing the sheet cover member to open and close an opening through the effects of moving means, and grounding the moving means.
In a cleaning mechanism, a sheet cover member is disposed being bent from an upper surface of a housing so as to be arranged along a side wall of the housing through a roller and static electricity of the sheet cover member is grounded through the moving means. A processing device includes the cleaning mechanism.
Inventors:
ESUMI KAZUYA
MATSUYAMA TOSHIFUMI
MATSUYAMA TOSHIFUMI
Application Number:
JP2012100860A
Publication Date:
November 07, 2013
Filing Date:
April 26, 2012
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q11/08; H01L21/304
Domestic Patent References:
JP2012040571A | 2012-03-01 | |||
JPH08117704A | 1996-05-14 | |||
JPH07251133A | 1995-10-03 | |||
JP2009129993A | 2009-06-11 | |||
JP2011106159A | 2011-06-02 | |||
JP2000068678A | 2000-03-03 | |||
JPH04122515U | 1992-11-04 |
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue
Hiroshi Oue