PROCESSING DEVICE, PROCESSING METHOD AND MANUFACTURING METHOD OF COMPONENT

Japanese Patent JP2016150415

A

PROBLEM TO BE SOLVED: To accurately estimate a processing amount or a processing speed in a catalyst support type processing method.SOLUTION: A tool 2 of which a processing surface 3 is composed of a catalyst substance containing a transition metal supporting hydrolysis of a surface to be processed and an object 1 to be processed are relatively moved while being brought into pressure contact with each other in such a state that water molecule of processing liquid 4 is interposed. Upon the processing, a processing control for managing a relative speed or a processing pressure with which the processing surface 3 and a surface 11 to be processed are relatively moved by a control unit is performed. Therein, a processing speed of the surface 11 to be processed is estimated by an estimation equation expressed by a difference between a member consisting of a product of a first constant, the processing pressure and the relative speed, and a member consisting of a product of a second constant and the cube of the relative speed. Further, the relative speed or the processing pressure with which the processing surface and the surface to be processed are relatively moved based on the estimated processing speed is managed.SELECTED DRAWING: Figure 5

MIYAUCHI HIROKI
ANDO MANABU
SADAKUNI SHUN
YAMAUCHI KAZUTO

JP2015029373A

August 22, 2016

February 18, 2015

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UNIV OSAKA
CANON KK

B24B13/02; C03C19/00

Kazuo Chikajima
Takashi Daejeon

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