Title:
PROCESSING DEVICE AND PROCESSING METHOD, METHOD FOR MANUFACTURING DEVICE, AND COMPUTER PROGRAM
Document Type and Number:
Japanese Patent JP2017121673
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To make it possible to suitably deform an object and properly locate the object at a desired position.SOLUTION: A processing device (1) comprises a spatial light modulator (14) which modulates incident light (EL2) in a desired modulation pattern and ejects said light, and a controller (19) which controls the spatial light modulator. The controller controls the spatial light modulator so as (i) to modulate light in a first modulation pattern, and (ii) to condensate modulated light (EL3) to a first object (CNT) thereby generating a light trap force in the first object, and controls the spatial light modulator so as (i) to change the first modulation pattern, and (ii) to deform the first object and to locate the first object at a desired position while capturing the first object.SELECTED DRAWING: Figure 4
Inventors:
KUNIGOME YUJI
NISHINO MINEYUKI
ODATE AKIRA
NAKAZUMI MAKOTO
ARAI MASAYOSHI
NOBORI MICHIO
NISHINO MINEYUKI
ODATE AKIRA
NAKAZUMI MAKOTO
ARAI MASAYOSHI
NOBORI MICHIO
Application Number:
JP2016000610A
Publication Date:
July 13, 2017
Filing Date:
January 05, 2016
Export Citation:
Assignee:
NIKON CORP
International Classes:
B25J7/00; B82Y30/00; B82Y40/00; G02B21/32
Domestic Patent References:
| JP2007114403A | 2007-05-10 | |||
| JP2003231095A | 2003-08-19 | |||
| JP2004230528A | 2004-08-19 | |||
| JP2007510160A | 2007-04-19 | |||
| JP2015501273A | 2015-01-15 | |||
| JP2007152514A | 2007-06-21 | |||
| JP2013147378A | 2013-08-01 | |||
| JP2006030427A | 2006-02-02 | |||
| JP2012159335A | 2012-08-23 |
Foreign References:
| US20080174870A1 | 2008-07-24 |
Attorney, Agent or Firm:
Tatsuo Egami