PROCESSING DEVICE AND PROCESSING METHOD USING SCANNING TYPE ELECTRON MICROSCOPE

Japanese Patent JP2015035379

A

PROBLEM TO BE SOLVED: To resolve a problem that, in an image shift function in an SEM, when image shift is performed, aberration is generated in a direction of the image shift so as to correspond to an image shift amount, and resolution reduction is generated if remained as it is.SOLUTION: A processing device using a scanning type electron microscope comprises: a scanning type electron microscope having an electron optical system for irradiating and scanning a sample placed on a stage with a converged electron beam, and imaging the sample; and an image processing and controlling unit controlling the scanning type electron microscope, and processing an image obtained by imaging with the scanning type electron microscope. In the processing device, the electron optical system of the scanning type electron microscope is configured to have an image shift electrode configured by an electrostatic electrode that shifts an imaging region of the sample by moving a position where the converged electron beam is irradiated on the sample in a state that the stage is stopped.

JPS56120065	ELECTRON BEAM DEVICE
WO/2004/077479	DEFLECTING ACCELERATION/DECELERATION GAP
JPH0457327	CHARGED BEAM WORKING EQUIPMENT

RI UEN
KADOI RYO
KAWANO HAJIME
TAKAHASHI HIROYUKI

JP2013166630A

February 19, 2015

August 09, 2013

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HITACHI HIGH TECH CORP

H01J37/147; H01J37/28

JPH0845460A	1996-02-16
JP2008084626A	2008-04-10
JP2003197138A	2003-07-11
JP2013054908A	2013-03-21
JP2012114202A	2012-06-14
JP2006093251A	2006-04-06
JP2012249078A	2012-12-13

青稜 patent business corporation
Polaire Intellectual Property Corporation

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