Title:
PROCESSING DEVICE AND PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2023076942
Kind Code:
A
Abstract:
To provide a processing device and a processing method, which reduce a use amount of a liquid.SOLUTION: A processing device 1 comprises a processing part, a first accumulation part 61, and a first supply part 62. The processing part includes: a holding part that holds a substrate; a processing part (a tool driving part) that processes the substrate held by the holding part; and a mobile part (a rotational table) that makes the holding part move between handing-over area B1 where the substrate is given to the holding part and a processing area B2 where the substrate is processed by the processing part. The first accumulation part accumulates a liquid L discharged from the handing-over area. The first supply part supplies the liquid accumulated in the first accumulation part to an object in the processing area.SELECTED DRAWING: Figure 4
Inventors:
KODAMA MUNEHISA
Application Number:
JP2021189990A
Publication Date:
June 05, 2023
Filing Date:
November 24, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/304; B23Q11/00; B23Q11/10; B24B41/06; B24B55/02
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito