Title:
処理装置及び処理方法、加工方法、並びに、造形装置及び造形方法
Document Type and Number:
Japanese Patent JP7120253
Kind Code:
B2
Abstract:
A processing apparatus is a processing apparatus that performs a process for irradiating an object with an energy beam, the processing apparatus is provided with: an energy beam irradiation apparatus that irradiates at least a part of a surface of the object with the energy beam; and a position change apparatus that changes an irradiation position of the energy beam at the surface of the object, the processing apparatus controls the irradiation position of the energy beam by using a shape information relating to a shape of the object.
Inventors:
Kazuki Ueno
Kei Sekiguchi
Masayuki Shiraishi
Shigeki Egami
Kei Sekiguchi
Masayuki Shiraishi
Shigeki Egami
Application Number:
JP2019559452A
Publication Date:
August 17, 2022
Filing Date:
December 12, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B23K26/342; B22F3/105; B22F3/16; B23K26/00; B23K26/02; B23K26/03; B23K26/04; B33Y10/00; B33Y30/00; B33Y50/02
Domestic Patent References:
| JP2015058455A | ||||
| JP2017036506A | ||||
| JP2015196249A | ||||
| JP2017019018A | ||||
| JP2016055603A |
Foreign References:
| WO2016075801A1 | ||||
| US20170232518 |
Attorney, Agent or Firm:
Tatsuo Egami