Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2015226945
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a processing device which prevents incorrect attachment of a process tool to a spindle.SOLUTION: A processing device includes: a chuck table which holds a workpiece; and processing means which processes the workpiece held by the chuck table with a process tool attached to a tip of a spindle. The processing means includes a mount member which is fixed to the tip of the spindle and to which the process tool is attached. The processing device includes determination means which is disposed near the processing means and determines if the process tool to be fixed to the mount member is suitable for attachment to the mount member.
Inventors:
KAKEFUDA MASAKI
KIHARA TOMOHARU
SEKIYA KATSUHIKO
KIHARA TOMOHARU
SEKIYA KATSUHIKO
Application Number:
JP2014112993A
Publication Date:
December 17, 2015
Filing Date:
May 30, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B45/00; B23Q3/155; B23Q17/00; B24B5/35; B24B27/06; H01L21/301; H01L21/304
Domestic Patent References:
| JP2009241177A | 2009-10-22 | |||
| JPH04331045A | 1992-11-18 | |||
| JP2001144034A | 2001-05-25 | |||
| JPS61209858A | 1986-09-18 | |||
| JPS62218051A | 1987-09-25 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto