Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2016078132
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a processing device which can prevent dryness of a work-piece during movement of a chuck table.SOLUTION: A processing device 2, which includes: a chuck table 22 for holding a work-piece; polishing means 38a, 38b for polishing the work-piece held by the chuck table; polishing water supply means which supplies polishing water to an exposed surface of the work-piece held by the chuck table when polishing the work-piece by the polishing means; a circular turn table 20 which moves the chuck table between a carry-in/carry-out position A at which carry-in/carry-out of the work-piece with respect to the chuck table is performed and polishing positions B, C at which the work-piece held by the chuck table is polished, is further equipped with a liquid supply nozzle 50 as liquid supply means which supplies a liquid to the work-piece when the chuck table is moved by rotation of the turn table.SELECTED DRAWING: Figure 1
Inventors:
WATANABE SHINYA
Application Number:
JP2014208965A
Publication Date:
May 16, 2016
Filing Date:
October 10, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B37/34; B24B41/06; H01L21/304
Domestic Patent References:
| JP2011042003A | 2011-03-03 | |||
| JP2013255952A | 2013-12-26 | |||
| JP2012076171A | 2012-04-19 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto