Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2019140172
Kind Code:
A
Abstract:
To improve the processing efficiency of a workpiece.SOLUTION: A processing device that processes a workpiece with a peelable tape attached to the bottom surface by applying external stimulus includes a load table that supports the workpiece before processing through the tape in a region on one side adjacent to a carry-in/out region in the indexing feed direction, an unload table that supports the workpiece after processing through the tape in a region on the other side adjacent to the carry-in/out region in the indexing feed direction, a transport mechanism that transports the workpiece, and an external stimulus applying unit that applies the external stimulus to the tape attached to the lower surface of the workpiece supported by the unload table.SELECTED DRAWING: Figure 3
Inventors:
KAWAMURA KENTA
Application Number:
JP2018020170A
Publication Date:
August 22, 2019
Filing Date:
February 07, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B27/06; B24B41/06; H01L21/677; H01L21/683
Domestic Patent References:
| JP2017084893A | 2017-05-18 | |||
| JP2017084950A | 2017-05-18 | |||
| JP2017228617A | 2017-12-28 | |||
| JP2017098471A | 2017-06-01 | |||
| JP2014143268A | 2014-08-07 | |||
| JPH05293795A | 1993-11-09 | |||
| JP2000232080A | 2000-08-22 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro