Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023000803
Kind Code:
A
Abstract:
To provide a processing device which achieves high efficiency in cooling of a motor driver compared to conventional processing devices and enables reduction of a possibility of a short circuit which may be caused in a circuit board of the motor driver by cooling compared to conventional processing devices.SOLUTION: A processing device includes: a chuck table which holds a workpiece; a spindle 22 to which a cutting blade 21, a grind stone tool which processes the workpiece held by the chuck table, is attached; a spindle housing 25 which rotatably supports the spindle 22 and includes a cooling water passage 27 therein; and a motor driver unit 40 which controls a motor 24 which rotates the spindle 22. The motor driver unit 40 is water-cooled by a water passage 47 through which water discharged from the cooling water passage 27 of the spindle housing 25 passes.SELECTED DRAWING: Figure 2
Inventors:
UMAJI RYOGO
Application Number:
JP2021101828A
Publication Date:
January 04, 2023
Filing Date:
June 18, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/00; B23Q11/12; B24B7/04; B24B27/06; H01L21/301; H01L21/304
Attorney, Agent or Firm:
Sakai International Patent Office
Previous Patent: How to use the adhesive sheet and the adhesive sheet
Next Patent: transmitter and receiver
Next Patent: transmitter and receiver