Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023018318
Kind Code:
A
Abstract:
To prevent leakage of mist-like grinding water from a processing chamber without using a bellows cover.SOLUTION: A processing device includes: a chuck table having a holding surface which suctions and holds a workpiece; a processing unit which has a spindle disposed along a vertical direction, a spindle housing which rotatably holds the spindle, and a discoid mount part fixed to a lower end part of the spindle protruding to an area below the spindle housing and which processes the workpiece suctioned and held by the holding surface with a processing tool attached to the lower surface side of the mount part; a processing chamber cover including a top plate having an opening into which a lower end part of the spindle housing is inserted, the processing chamber cover covering the processing chamber in which the chuck table and the mount part are disposed; and a fluid supply unit having a nozzle which supplies a fluid to a gap between the spindle housing and the opening.SELECTED DRAWING: Figure 2
Inventors:
AKABANE ATSUNORI
ITO FUMITETSU
OHINO KOICHI
ANDO SHIGERU
KAKEI YOSUKE
MATSUO RYOHEI
ITO FUMITETSU
OHINO KOICHI
ANDO SHIGERU
KAKEI YOSUKE
MATSUO RYOHEI
Application Number:
JP2021122354A
Publication Date:
February 08, 2023
Filing Date:
July 27, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/08; B24B55/06; H01L21/304
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato