Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023022522
Kind Code:
A
Abstract:
To provide a processing device configured so as to prevent processing water from leaking and enable loads acting on processing/feeding means to reduce.SOLUTION: A processing device includes holding means 4 that holds a work-piece, processing means that applies processing while supplying processing water to the work-piece held by the holding means 4, and processing/feeding means that processes and feeds the holding means 4. The holding means 4 includes a chuck table 10 with a holding surface for holding the work-piece, a slider plate 12 made of nonmagnetic materials that supports the chuck table 10 slidably, and a magnetic body that magnetizes the chuck table 10 through the slider plate 12. The processing/feeding means comprises a guide rail that extends in a processing/feeding direction to support the magnetic body slidably, and a driving part that moves the magnetic body supported on the guide rail.SELECTED DRAWING: Figure 3
Inventors:
MATSUYAMA TOSHIFUMI
TANAKA MAKOTO
TANAKA MAKOTO
Application Number:
JP2021127436A
Publication Date:
February 15, 2023
Filing Date:
August 03, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; B23Q5/22; B23Q5/28; B23Q11/00; B24B27/06; B24B55/02; B24B55/06; H01L21/301
Attorney, Agent or Firm:
Naozumi Ono
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko
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