Title:
処理設備、及びアイソレーターシステム
Document Type and Number:
Japanese Patent JP7000178
Kind Code:
B2
Abstract:
To provide a treatment facility and the like which allow objects to be treated to be delivered under similar conditions.SOLUTION: A treatment facility 1 comprises a plurality of treatment containers 21 in which a treatment to an object to be treated is performed. The treatment containers 21 are arranged, along a circumferential direction, around a center part O set on a floor 103 of a treatment chamber 10. Glove boxes(GB) 3 comprise a glove 302 for executing internal operation, which are connected to the treatment containers 21 respectively to form operation spaces 30 isolated from the outside. Running tracks 32 are arranged along arrangement directions of the plurality of treatment containers 21, and in the tracks are provided running mechanisms 31 connected to the GB 21 to be freely runnable.SELECTED DRAWING: Figure 1
Inventors:
Takeshi Kojima
Naoki Fukuma
Naoki Fukuma
Application Number:
JP2018013993A
Publication Date:
January 19, 2022
Filing Date:
January 30, 2018
Export Citation:
Assignee:
JGC Corporation
International Classes:
B25J21/02; B01L1/00; B65G35/00
Domestic Patent References:
| JP5588574B1 | ||||
| JP2015076472A |
Attorney, Agent or Firm:
Patent Corporation Yayoi Patent Office
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