Title:
処理装置,および,処理装置のメンテナンス方法
Document Type and Number:
Japanese Patent JP4214114
Kind Code:
B2
Abstract:
The electrode temperature control device in a processing apparatus 100 includes a freezing circuit 110 comprising a compressor 148 , a condenser 142 , an expansion valve 150 and an evaporator 108 with the evaporator disposed inside a lower electrode 106 . This electrode temperature control device does not require components such as a coolant tank for storing the coolant, a pump for supplying the coolant to the processing apparatus, a heater for adjusting the temperature of the coolant and a heat exchanger for exchanging heat between a primary coolant and a secondary coolant. Thus, the production cost can be lowered, a reduction in installation area through miniaturization of the apparatus is achieved and more efficient use of energy is achieved as well. In addition, by using CO2 as the coolant, the GWP value can be reduced to approximately 1/8000 to 1/7000 that of Freon.
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Inventors:
Takaoka Hirooka
Furuya Masao
Shohei Tsutsumi
Furuya Masao
Shohei Tsutsumi
Application Number:
JP2004535896A
Publication Date:
January 28, 2009
Filing Date:
September 02, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
ダイキン工業株式会社
ダイキン工業株式会社
International Classes:
F25B45/00; F25B1/00; F25B9/00; F25B39/02; F25B41/04; F28D7/04; H01J37/32; H01L21/00; H01L21/3065
Domestic Patent References:
| JP9312281A | ||||
| JP5164437A | ||||
| JP11063686A | ||||
| JP2001156042A | ||||
| JP7335630A | ||||
| JP9113152A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara