Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2022034480
Kind Code:
A
Abstract:
To provide a processing device that enables a frame unit to be stored in an appropriate position of a cassette.SOLUTION: A processing device comprises: a cassette placement part 5; a chuck table 10; a processing unit 20; a guide part 6, arranged adjacent to the cassette placement part 5, which supports a frame unit 100 that is pulled out from or stored in a cassette 60; and a conveying unit 70. The conveying unit 70 comprises; a holding part 71 that holds an end part at a front side of an annular frame 120 of the frame unit 100; a movement unit 72 that moves the holding part 71 back and forth with respect to the cassette 60; and a sensor 73 that detects that the frame unit 100 which moves to the cassette 60 by sliding the guide part 6 is positioned at a predetermined position. The holding part 71 moves by a predetermined distance toward the cassette 60 after a time point at which the sensor 73 detects the frame unit 100, so as to push the frame unit 100 into the cassette 60 by a predetermined amount to store the unit.SELECTED DRAWING: Figure 1
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Inventors:
INOUE KATSUMI
Application Number:
JP2020138292A
Publication Date:
March 03, 2022
Filing Date:
August 18, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; H01L21/677; H01L21/304
Attorney, Agent or Firm:
Sakai International Patent Office