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Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2022034719
Kind Code:
A
Abstract:
To determine whether or not a spinner table in an appropriate shape is mounted in a spinner cleaning mechanism.SOLUTION: A setting section selects an appropriate shape of a spinner table 80 corresponding to processing conditions. Further, a recognition section is capable of recognizing a shape of a spinner table 80 which is actually installed in a spinner cleaning mechanism 70, using a table sensor 93. In a case where the appropriate shape of the spinner table 80 is different from the shape of the actually installed spinner table 80, a notification section notifies a worker thereof. Therefore, in a case where a spinner table 80 in an inappropriate shape is installed in the spinner cleaning mechanism 70, the worker is capable of recognizing it beforehand. Accordingly, damage of a wafer or a device caused by installing the spinner table 80 in the inappropriate shape can be suppressed.SELECTED DRAWING: Figure 2

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Inventors:
ONAMI TAKESHI
NAKATSUKA ATSUSHI
Application Number:
JP2020138555A
Publication Date:
March 04, 2022
Filing Date:
August 19, 2020
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B24B49/10; B24B55/06; H01L21/683
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office



 
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