Title:
加工装置
Document Type and Number:
Japanese Patent JP6887260
Kind Code:
B2
Abstract:
A processing device is provided and enables an operator to easily and reliably confirm the setting of operating conditions. The processing device processes a workpiece in a fully automatic operation by using a plurality of components for performing various processes in a series of processing steps. The processing device is configured to have a processing unit that performs various processes in each component, and an operation panel (79) that receives an operation condition of each component, and a video image storage unit (77) that stores the processing operation corresponding to the operationcondition as a video image. The video images of the processing operations are displayed on the operation panel according to a series of processing steps of the full automatic operation before the full automatic operation.
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Inventors:
Chano Rintaro
Uemura Yuji
Uemura Yuji
Application Number:
JP2017018387A
Publication Date:
June 16, 2021
Filing Date:
February 03, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B23Q17/00; B24B51/00; H01L21/301; H01L21/304
Domestic Patent References:
| JP2013197239A | ||||
| JP2016219528A | ||||
| JP2016168632A | ||||
| JP2009194326A | ||||
| JP8107095A | ||||
| JP2013045966A | ||||
| JP2014192461A | ||||
| JP2016215337A |
Foreign References:
| US6813536 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki