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Title:
PROCESSING LIQUID SUPPLY DEVICE FOR DEVELOPING PROCESSOR
Document Type and Number:
Japanese Patent JPH11218889
Kind Code:
A
Abstract:

To provide a developing liquid supply device used for a developing processor and constituted so that the supply quantity can be accurately controlled even when a supply pump whose specification is varied or the various kinds of processing liquid are used.

The developing liquid supply device used for a developing processor is provided with the supply pump 30 supplying the processing liquid to a processing tank 11 from a supply liquid tank 20 by the extending and contracting action thereof and an extending and contracting frequency detection means 110 detecting the extending and contracting frequency of the pump 30. Besides, it is provided with a discharge quantity measurement means 50 measuring the discharge quantity of the processing liquid by one extending and contracting action of the pump 30 and a control means 100 controlling the pump 30 based on the required supply quantity and the measured discharge quantity.


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Inventors:
MIKE MASAAKI
Application Number:
JP1865398A
Publication Date:
August 10, 1999
Filing Date:
January 30, 1998
Export Citation:
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Assignee:
NORITSU KOKI CO LTD
International Classes:
G03D3/06; F04B13/00; F04B49/06; (IPC1-7): G03D3/06; F04B13/00; F04B49/06
Attorney, Agent or Firm:
Shuichiro Kitamura