Title:
PROCESSING LIQUID TEMPERATURE CONTROL METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP3756735
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide a processing liquid temperature control method and apparatus which can realize highly accurate temperature control with quick response.
SOLUTION: Cooling water 102 in temperature lower than that of a processing liquid is continuously supplied into a tank 10 containing with processing liquid or to the external circumference thereof. Meanwhile, when the temperature of processing liquid becomes the predetermined temperature (for example, 25°C) or lower, a heater 4 provided in the tank 10 or at the external circumference thereof is activated to raise the temperature of processing liquid. When the temperature of the processing liquid becomes the predetermined temperature (for example, 25°C) of higher, the heater 4 is turned off.
Inventors:
Tanaka, Koji
Application Number:
JP2000000220107
Publication Date:
January 06, 2006
Filing Date:
July 21, 2000
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B08B3/10; H01L21/304; B05C9/14; B05C11/10; G05D23/19; B08B3/10; H01L21/02; B05C9/14; B05C11/10; G05D23/19; (IPC1-7): H01L21/304; B05C9/14; B05C11/10; B08B3/10; G05D23/19