Title:
PROCESSING METHOD AND PROCESSOR
Document Type and Number:
Japanese Patent JP3328869
Kind Code:
B2
Abstract:
PURPOSE: To improve the yield by recovering substance to be processed, according to the processing situation, and enabling the reuse of the substance to be processed, when the drive of each device stops during processing.
CONSTITUTION: When the drive during processing stops, an alarm 9 indicates its stop, and a sensor 50 detects the processing condition of a semiconductor wafer W during stop of drive, and also a mapping sensor 15 detects the state of existence or nonexistence of the semiconductor wafer within a container 6a for carriage out and a container 6b for recovery. An unprocessed semiconductor wafer W is carried into a container 6a for carriage out and a processed semiconductor wafer W into a container 6b for recovery by driving CPU 8, based on the signals of the sensor 50 and the mapping sensor 15, and driving a carrier 4 and a main arm 10, based on the signal from the CPU 8.
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Inventors:
Junji Harada
Ichiro Harada
Ichiro Harada
Application Number:
JP18353995A
Publication Date:
September 30, 2002
Filing Date:
June 27, 1995
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/07; G06Q50/00; G06Q50/04; H01L21/02; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; G06F17/60; H01L21/02
Domestic Patent References:
| JP8191040A | ||||
| JP6127609A | ||||
| JP63155643A | ||||
| JP4127555A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto
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