Title:
処理方法及びシステム
Document Type and Number:
Japanese Patent JP4336509
Kind Code:
B2
Abstract:
A processing method uses a processing system which includes an atmosphere replacing chamber having first and second gate valves (3,4), and a chamber (1) that has an inside maintained in a reduced pressure or vacuum atmosphere and provides a predetermined process to an object, wherein the atmosphere replacing chamber (2) is connected to the chamber (1) through the first gate valve (3) and a space different from the chamber (1) through the second gate valve (4). The processing method includes the steps of exhausting the atmosphere replacing chamber (2) while introducing first gas below predetermined humidity to the atmosphere replacing chamber (2), and vacuum-pumping the atmosphere replacing chamber (2) after said exhausting step, by reducing an amount of the first gas to be introduced into the atmosphere replacing chamber (2).
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Inventors:
Eigo Kawakami
Application Number:
JP2003062338A
Publication Date:
September 30, 2009
Filing Date:
March 07, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; H01L21/205; C23C14/56; C23C16/54; G03F7/20; H01L21/00; H01L21/02; H01L21/677
Domestic Patent References:
| JP2002025890A | ||||
| JP2000306838A | ||||
| JP2001102281A | ||||
| JP2000040669A | ||||
| JP2003045947A | ||||
| JP2002164286A | ||||
| JP6177066A | ||||
| JP2004146781A |
Attorney, Agent or Firm:
Ryosuke Fujimoto