Title:
PROCESSING METHOD FOR WORK PIECE
Document Type and Number:
Japanese Patent JP2022042709
Kind Code:
A
Abstract:
To provide a processing method for a work piece by which flying of an individual piece and chipping of an individual piece can be prevented during a cutting process.SOLUTION: A processing method for a work piece includes: a fixing step of fixing a work piece to a support substrate; a first holding step of holding a side of the support substrate on a holding table 10; a first cutting step of cutting the work piece held on the holding table 10, with a cutting blade 21 along a first scheduled division line to form a plurality of narrow pieces; a peeling step of peeling the narrow pieces from the support substrate; an accommodating step of accommodating the narrow strips in a jig 220 that has a groove 225 for accommodating the narrow strips and supports the narrow strips with a bottom surface 226 and two side surfaces 227 of the groove 225; a second holding step of holding the jig 220 on the holding table 10; and a second cutting step of cutting the narrow pieces along a second scheduled division line 102 with the cutting blade 21 together with the jig 220 to obtain individual pieces.SELECTED DRAWING: Figure 7
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Inventors:
YE JIA
Application Number:
JP2020148262A
Publication Date:
March 15, 2022
Filing Date:
September 03, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B23Q3/06; B23Q3/08; B24B41/06; H01L21/301
Attorney, Agent or Firm:
Sakai International Patent Office